Linearity and speed optimization in SOI LDMOS using gate engineering

Abstract
The major challenge the radio frequency laterally double-diffused metal  oxide semiconductor (RF LDMOS) faces today is the linearity and  switching delay. In this paper, we propose a new, gate-engineered silicon- on-insulator (SOI) LDMOS device to overcome this problem. The proposed  device has three gates arranged in a stepped manner, from the channel to drift region. The first gate uses p+poly (near the source), whereas the other  two gates have n+ poly. The first gate with a thin gate oxide achieves good control over the channel charge. The third gate with a thick gate oxide at the  drift region achieves reduced gate to drain capacitance. The arrangement  of second and third gates in a stepped manner in the drift region spreads  the electric field uniformly. Using two-dimensional device simulations, the  proposed LDMOS is compared with the conventional LDMOS. We  demonstrate that the proposed device exhibits significant enhancements in  linearity, switching delay, breakdown voltage, on-resistance, peak transconductance and gate-drain charge making it highly suitable for RF  power amplifiers.

This paper can be downloaded from http://web.iitd.ac.in/~mamidala/id11.htm

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